http://nano3.calit2.net/
Nano3 provides advanced capabilities for fabrication and characterization in a state-of-the-art cleanroom opened in May 2006.
The name Nano3 reflects the synergetic nature of the facility, focusing on three fields of nanoscale research and development within the space - Nanoscience, Nanoengineering and Nanomedicine.
In addition to providing essential nanofabrication capabilities for research on electronic and optoelectronic materials and devices, the facility is intended to facilitate the pursuit of research in emerging, interdisciplinary, and rapidly growing fields such as biomedical and biochemical devices, heterogeneous integrated devices and circuits, and sensor technology.
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